CONFERENCE PROCEEDINGS
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Jin Chai
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Author
Publications (4)
Proceedings Article | 16 August 2013 Paper
Research on silicon microchannel array oxidation insulation technology and stress issues
Proceedings Volume 8912, 89120J (2013) https://doi.org/10.1117/12.2033036
KEYWORDS: Silicon, Oxygen, Silica, Silicon films, Thin films, Thermal oxidation, Microchannel plates, Semiconducting wafers, Dielectrics, Oxidation
Proceedings Article | 16 August 2013 Paper
Influences of temperature and concentrations on morphology of TMAH anisotropic etching for silicon microchannel plate
Proceedings Volume 8912, 89120B (2013) https://doi.org/10.1117/12.2032481
KEYWORDS: Etching, Silicon, Anisotropic etching, Semiconducting wafers, Crystals, Temperature metrology, Scanning electron microscopy, Microchannel plates, Electrochemical etching, Microsystems
Proceedings Article | 16 August 2013 Paper
Influence of surfactant on aperture of photo-electro-chemical etching for silicon microchannel plate
Proceedings Volume 8912, 891207 (2013) https://doi.org/10.1117/12.2031826
KEYWORDS: Silicon, Etching, High aspect ratio silicon micromachining, Microchannel plates, Ions, Electrochemical etching, Interfaces, Silicon photomultipliers, Hydrogen, Silica
Proceedings Article | 16 August 2013 Paper
Influences of temperature and etching voltage on the surface morphology of photo-electro-chemical etching for silicon microchannel arrays
Proceedings Volume 8912, 891209 (2013) https://doi.org/10.1117/12.2031882
KEYWORDS: Silicon, Etching, Semiconducting wafers, Scattering, Photomicroscopy, Electrodes, Microchannel plates, Temperature metrology, Microelectromechanical systems, Diffusion
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