Jingwen Hu
at Swinburne Univ of Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 31 December 2019 Paper
Proc. SPIE. 11201, SPIE Micro + Nano Materials, Devices, and Applications 2019
KEYWORDS: Optical lithography, Etching, Solar cells, Silicon, Photonic crystals, Chromium, Laser ablation, Photomasks, Plasma etching

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