Jinhyung Lee
at Univ of Florida
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 30 September 2013 Paper
Rajiv Singh, Arul Chakkaravarthi Arjunan, Kannan Balasundaram, Jinhyung Lee, George Ling, Deepika Singh
Proceedings Volume 8837, 88370T (2013) https://doi.org/10.1117/12.2024689
KEYWORDS: Sapphire, Surface finishing, Polishing, Silica, Chemical mechanical planarization, Particles, Chemical reactions, Abrasives, Aluminum, Diamond

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