Joo Hoon Lee
at Samsung Electronics Co Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 3 April 2003
Proc. SPIE. 4944, Integrated Optical Devices: Fabrication and Testing
KEYWORDS: Silica, Waveguides, Etching, Polymers, Silicon, Oxygen, Wave propagation, Photomasks, Aluminum, Semiconducting wafers

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