Dr. Kartik Venkataraman
Senior Product Marketing Manager at KLA Tencor Corp
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Metrology, Diffractive optical elements, Fiber optic gyroscopes, Metals, Dielectrics, Electrons, Dielectrophoresis, Personal digital assistants, Process control, Semiconducting wafers

Proceedings Article | 24 March 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Lithography, Metrology, Data modeling, Etching, Scanners, Control systems, Scatterometry, Optical metrology, Time metrology, Signal processing, Measurement devices, Transistors, Critical dimension metrology, Semiconducting wafers, Model-based design, Instrument modeling

Proceedings Article | 18 March 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Thin films, Light sources, X-ray optics, Metrology, 3D acquisition, Metals, Germanium, Dielectrics, Silicon, Lamps, Control systems, 3D metrology, Process control, Transistors, Semiconducting wafers, Tolerancing

Proceedings Article | 19 March 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Lithography, Metrology, Data modeling, Scanners, Scatterometry, Finite element methods, Critical dimension metrology, Semiconducting wafers, Model-based design, Single crystal X-ray diffraction

Proceedings Article | 2 September 2009
Proc. SPIE. 7443, Applications of Digital Image Processing XXXII
KEYWORDS: Signal to noise ratio, Point spread functions, Imaging systems, Cameras, Sensors, Image processing, Image restoration, Interference (communication), Image sensors, Signal processing

Showing 5 of 7 publications
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