Dr. Kensuke Matsuzawa Profile

Dr. Kensuke Matsuzawa

at Tokyo Ohka Kogyo Co Ltd

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 20 March 2015 Paper

Aromatizing unzipping polyester for EUV photoresist

Kensuke Matsuzawa, Ryan Mesch, Mike Olah, Wade Wang, Scott Phillips, C. Grant Willson

Proceedings Volume 9425, 94251Q (2015) https://doi.org/10.1117/12.2085780

KEYWORDS: Polymers, Ultraviolet radiation, Extreme ultraviolet lithography, Absorption, Photoresist materials, Semiconducting wafers, Deep ultraviolet, Diffusion, Thin films, Bioalcohols

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Proceedings Article | 23 March 2012 Paper

Out-of-band insensitive polymer-bound PAG for EUV resist

Jun Iwashita, Taku Hirayama, Kensuke Matsuzawa, Yoshiyuki Utsumi, Katsumi Ohmori

Proceedings Volume 8322, 83220Y (2012) https://doi.org/10.1117/12.916355

KEYWORDS: Extreme ultraviolet, Deep ultraviolet, Absorption, Polymers, Extreme ultraviolet lithography, Lithography, Semiconducting wafers, Line width roughness, Diffusion, Lithographic illumination

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Proceedings Article | 16 April 2011 Paper

Characteristics of main chain decomposable STAR polymer for EUV resist

Jun Iwashita, Taku Hirayama, Isamu Takagi, Kensuke Matsuzawa, Kenta Suzuki, Sachiko Yoshizawa, Kenri Konno, Masahito Yahagi, Kazufumi Sato, Seiichi Tagawa, Kazuyuki Enomoto, Akihiro Oshima

Proceedings Volume 7972, 79720L (2011) https://doi.org/10.1117/12.879349

KEYWORDS: Polymers, Stars, Lithography, Diffusion, Floods, Semiconducting wafers, Extreme ultraviolet lithography, Polymer thin films, Image quality, Polymerization

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Proceedings Article | 1 April 2009 Paper

A study of the photo acid generator material design for chemically amplified photoresists

Y. Utsumi, T. Seshimo, Y. Komuro, A. Kawaue, K. Ishiduka, K. Matsuzawa, Hideo Hada, J. Onodera

Proceedings Volume 7273, 72732F (2009) https://doi.org/10.1117/12.815190

KEYWORDS: Diffusion, Lithography, Polymers, Semiconducting wafers, Molecular interactions, Photoresist materials, Sensors, Hydrogen, Silicon, Chemically amplified resists

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