Kishore Uppireddi
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 19 September 2007 Paper
Proc. SPIE. 6647, Nanocoatings
KEYWORDS: Thin films, Refractive index, Sputter deposition, Crystals, Silicon, Atomic force microscopy, Spectroscopic ellipsometry, Aluminum, Aluminum nitride, Molybdenum

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