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Lifu Ai
at Institute of Optics and Electronics CAS
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Publications (1)
Proceedings Article | 30 January 2019 Paper
Simple and rapid particle detection device for substrate surface
Lifu Ai, Jian Zhang, Changtao Wang, Xiangang Luo
Proceedings Volume 10841, 1084106 (2019) https://doi.org/10.1117/12.2505570
KEYWORDS: Particles, Light scattering, Image processing, Objectives, Defect detection, Lithography, Imaging systems, Laser scattering, Scattering, Charge-coupled devices
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