Prof. Lianguan Shen Profile

Prof. Lianguan Shen

at Univ of Science And Technology of China

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Author

Publications (2)

Proceedings Article | 28 October 2016 Paper

Thermal modeling of wafer-based precision glass molding process

Yang Hu, Lianguan Shen, Jian Zhou, Mujun Li

Proceedings Volume 9683, 96830J (2016) https://doi.org/10.1117/12.2242819

KEYWORDS: Semiconducting wafers, Precision glass molding, Thermal modeling, Glasses, Radiation effects, Glass molding, Performance modeling, Lamps, Optics manufacturing, Interfaces

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Proceedings Article | 28 October 2016 Paper

Improvement of three-dimensional microstructure contour accuracy using maskless lithography technique based on DMD

Shengzhou Huang, Mujun Li, Lianguan Shen, Jinfeng Qiu, Youquan Zhou

Proceedings Volume 9683, 96831P (2016) https://doi.org/10.1117/12.2242366

KEYWORDS: 3D microstructuring, Maskless lithography, Digital micromirror devices, Aspheric lenses, Photomasks, Micromirrors, Objectives, Lithium, Fabrication, Charge-coupled devices

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