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Qi Liu
at Institute of Optics and Electronics CAS
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Publications (1)
Proceedings Article | 15 October 2012 Paper
Study on Control Strategy for Coarse/Fine Dual-stage of Step and Scan Lithography
Proceedings Volume 8418, 84180X (2012) https://doi.org/10.1117/12.971471
KEYWORDS: Lithography, Control systems, Actuators, Mathematical modeling, Optics manufacturing, Feedback control, Servomechanisms, Integrated circuits, Device simulation, Interferometers
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