Atomic force microscope is one of indispensable measurement tools in nano/micronano precision manufacture and critical dimension measurement. To expand its industry application, a novel head and system are newly designed combined with Nanosensors cooperation’s patented probe — Akiyama probe, which is a self-sensing probe. The modal analysis and resonance frequency are obtained by finite element(FE) simulations. Using the Locked-in amplifier, the effective and available signal can be abtained. Through the experiment analysis, the retracting and extending curve reflects the tip and sample interaction. Furthermore, the measurement on the calibrated position system demonstrates that the whole system resolution can reach the nanometer scale.