Olivier Mermet
Engineer at STMicroelectronics SA
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 20 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Lithography, Contamination, Etching, Scanners, Semiconducting wafers, Overlay metrology, Plasma

Proceedings Article | 20 March 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Reticles, Metrology, Data modeling, Sensors, Scanners, Semiconducting wafers, Performance modeling, Data corrections, Overlay metrology, Process modeling, Lithographic process control

Proceedings Article | 26 March 2019 Presentation + Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Optical lithography, Statistical analysis, Etching, Error analysis, Reliability, Control systems, Scanning electron microscopy, Critical dimension metrology, Semiconducting wafers

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