Olivier Mermet
Engineer at STMicroelectronics
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Optical lithography, Statistical analysis, Etching, Error analysis, Reliability, Control systems, Scanning electron microscopy, Critical dimension metrology, Semiconducting wafers

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