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Patrick Chapon
Products Manager at HORIBA FRANCE SAS
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Publications (2)
Proceedings Article | 23 March 2017 Paper
Investigations on the substrate dependence of the properties in nominally-undoped beta-Ga2O3 thin films grown by PLD
F. Teherani, D. Rogers, V. Sandana, P. Bove, C. Ton-That, L. L. C. Lem, E. Chikoidze, M. Neumann-Spallart, Y. Dumont, T. Huynh, M. Phillips, P. Chapon, R. McClintock, M. Razeghi
Proceedings Volume 10105, 101051R (2017) https://doi.org/10.1117/12.2262757
KEYWORDS: Sapphire, Gallium, Thin films, Crystals, Aluminum, Transmittance, Silicon, Ocean optics, Thin film growth, Chlorine
Proceedings Article | 18 March 2013 Paper
Multidimensional depth profile analysis of oxide layers by plasma profiling techniques: GD-OES and PP-TOFMS
Agnès Tempez, Sébastien Legendre, Patrick Chapon
Proceedings Volume 8626, 862608 (2013) https://doi.org/10.1117/12.2010085
KEYWORDS: Plasma, Profiling, Silicon, Ions, Spectroscopy, Sputter deposition, Scanning electron microscopy, Interfaces, Oxides, Thin films
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