Patrick Chapon
at HORIBA FRANCE SAS
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 23, 2017
Proc. SPIE. 10105, Oxide-based Materials and Devices VIII
KEYWORDS: Thin films, Crystals, Silicon, Ocean optics, Sapphire, Transmittance, Aluminum, Chlorine, Gallium, Thin film growth

PROCEEDINGS ARTICLE | March 18, 2013
Proc. SPIE. 8626, Oxide-based Materials and Devices IV
KEYWORDS: Oxides, Thin films, Sputter deposition, Spectroscopy, Interfaces, Ions, Silicon, Scanning electron microscopy, Profiling, Plasma

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