Dr. Robert D. Miller
SPIE Involvement:
Publications (20)

Proceedings Article | 16 April 2011 Paper
Qinghuang Lin, A. Nelson, L. Bozano, P. Brock, S. Cohen, B. Davis, R. Kwong, E. Liniger, D. Neumayer, J. Rathore, H. Shobha, R. Sooriyakumaran, S. Purushothaman, R. Miller, R. Allen, T. Spooner, R. Wisnieff
Proceedings Volume 7972, 79721A (2011) https://doi.org/10.1117/12.881571
KEYWORDS: Dielectrics, Electron beam lithography, Lithography, Photomasks, Silicon, Scanning electron microscopy, Scanners, Copper, Back end of line, Optical lithography

Proceedings Article | 26 March 2010 Paper
Qinghuang Lin, S. Chen, A. Nelson, P. Brock, S. Cohen, B. Davis, N. Fuller, R. Kaplan, R. Kwong, E. Liniger, D. Neumayer, J. Patel, H. Shobha, R. Sooriyakumaran, S. Purushothaman, T. Spooner, R. Miller, R. Allen, R. Wisnieff
Proceedings Volume 7639, 76390J (2010) https://doi.org/10.1117/12.851225
KEYWORDS: Back end of line, Copper, Dielectrics, Optical lithography, Scanning electron microscopy, Silicon, Manufacturing, Semiconducting wafers, Ultraviolet radiation, Polymers

Proceedings Article | 21 March 2007 Paper
Ho-Cheol Kim, Joy Cheng, Charles Rettner, Oun-Ho Park, Robert Miller, Mark Hart, Linnea Sundström, Ying Zhang
Proceedings Volume 6519, 65191H (2007) https://doi.org/10.1117/12.711687
KEYWORDS: Silicon, Phase modulation, Scanning electron microscopy, Plasma etching, Natural surfaces, Transmission electron microscopy, Oxides, Etching, Thin films, Electron beam lithography

Proceedings Article | 18 May 1999 Paper
Jeong-Ik Lee, Gerrit Klaerner, Jian Chen, J. Campbell Scott, Robert Miller
Proceedings Volume 3623, (1999) https://doi.org/10.1117/12.348390
KEYWORDS: Polymers, Annealing, Electroluminescence, Absorption, Chlorine, Light emitting diodes, Organic light emitting diodes, Luminescence, Nitrogen, Oxidation

Proceedings Article | 1 December 1997 Paper
Jin Zhang, Melissa Kreger, Gerrit Klaerner, M. Kreyenschmidt, Robert Miller, J. Campbell Scott
Proceedings Volume 3145, (1997) https://doi.org/10.1117/12.284150
KEYWORDS: Excitons, Polymers, Picosecond phenomena, Absorption, Luminescence, Polarons, Femtosecond phenomena, Molecules, Thin films, Polarization

Showing 5 of 20 publications
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