Dr. Robert D. Miller
SPIE Involvement:
Author
Publications (20)

Proceedings Article | 16 April 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Scanners, Copper, Dielectrics, Silicon, Scanning electron microscopy, Photomasks, Back end of line

Proceedings Article | 26 March 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Optical lithography, Polymers, Ultraviolet radiation, Copper, Dielectrics, Silicon, Manufacturing, Scanning electron microscopy, Semiconducting wafers, Back end of line

Proceedings Article | 21 March 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Oxides, Thin films, Electron beam lithography, Phase modulation, Etching, Silicon, Scanning electron microscopy, Transmission electron microscopy, Plasma etching, Natural surfaces

Proceedings Article | 18 May 1999
Proc. SPIE. 3623, Organic Photonic Materials and Devices
KEYWORDS: Light emitting diodes, Organic light emitting diodes, Polymers, Annealing, Luminescence, Nitrogen, Electroluminescence, Chlorine, Absorption, Oxidation

Proceedings Article | 1 December 1997
Proc. SPIE. 3145, Optical Probes of Conjugated Polymers
KEYWORDS: Thin films, Femtosecond phenomena, Polarization, Polymers, Luminescence, Molecules, Excitons, Picosecond phenomena, Polarons, Absorption

Showing 5 of 20 publications
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