Ruichao Zhu
Research Assistant at Univ of New Mexico
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Metrology, Silica, Polarization, Reflection, Etching, Polarizers, Scanning electron microscopy, Scatterometry, Aluminum, Scatter measurement

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