Dr. Sara Fernandez
at Paul Scherrer Institut
SPIE Involvement:
Publications (11)

SPIE Journal Paper | 30 January 2020
JM3, Vol. 19, Issue 01, 014002, (January 2020) https://doi.org/10.1117/12.10.1117/1.JMM.19.1.014002
KEYWORDS: Extreme ultraviolet, Carbon, Reticles, Inspection, Defect detection, Coherence imaging, Photomasks, Phase measurement, Reflectivity, Microscopes

Proceedings Article | 21 June 2019 Paper
Proceedings Volume 11057, 1105703 (2019) https://doi.org/10.1117/12.2534350
KEYWORDS: Photomasks, Extreme ultraviolet, Semiconductors, Inspection, Metrology, Lithography, Mirrors, Particles, Diffraction

Proceedings Article | 26 March 2019 Presentation + Paper
Proceedings Volume 10957, 109570W (2019) https://doi.org/10.1117/12.2515160
KEYWORDS: Inspection, Extreme ultraviolet, Reticles, Photomasks, Defect detection, Defect inspection, Phase measurement, Microscopes

SPIE Journal Paper | 18 March 2019
JM3, Vol. 18, Issue 01, 013506, (March 2019) https://doi.org/10.1117/12.10.1117/1.JMM.18.1.013506
KEYWORDS: Photomasks, Nickel, Extreme ultraviolet, Inspection, Signal to noise ratio, Line edge roughness, Extreme ultraviolet lithography, Reflectivity, Image acquisition, Diffraction

SPIE Journal Paper | 13 March 2019
JM3, Vol. 18, Issue 01, 014002, (March 2019) https://doi.org/10.1117/12.10.1117/1.JMM.18.1.014002
KEYWORDS: Pellicles, Extreme ultraviolet, Scattering, Reticles, Diffraction, Image quality, Inspection, Coating, Photomasks, Carbon nanotubes

Showing 5 of 11 publications
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