Dr. Sara Fernandez
at Paul Scherrer Institut
SPIE Involvement:
Author
Publications (11)

SPIE Journal Paper | 30 January 2020
JM3 Vol. 19 Issue 01
KEYWORDS: Extreme ultraviolet, Carbon, Reticles, Inspection, Defect detection, Coherence imaging, Photomasks, Phase measurement, Reflectivity, Microscopes

Proceedings Article | 21 June 2019 Paper
Proc. SPIE. 11057, Modeling Aspects in Optical Metrology VII
KEYWORDS: Semiconductors, Lithography, Diffraction, Mirrors, Metrology, Particles, Inspection, Photomasks, Extreme ultraviolet

Proceedings Article | 26 March 2019 Presentation + Paper
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Microscopes, Reticles, Defect detection, Inspection, Photomasks, Extreme ultraviolet, Phase measurement, Defect inspection

SPIE Journal Paper | 18 March 2019
JM3 Vol. 18 Issue 01
KEYWORDS: Photomasks, Nickel, Extreme ultraviolet, Inspection, Signal to noise ratio, Line edge roughness, Extreme ultraviolet lithography, Reflectivity, Image acquisition, Diffraction

SPIE Journal Paper | 13 March 2019
JM3 Vol. 18 Issue 01
KEYWORDS: Pellicles, Extreme ultraviolet, Scattering, Reticles, Diffraction, Image quality, Inspection, Coating, Photomasks, Carbon nanotubes

Showing 5 of 11 publications
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