Dr. Sebastien Lani
at CSEM SA
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | September 25, 2017
Proc. SPIE. 10562, International Conference on Space Optics — ICSO 2016
KEYWORDS: Mirrors, Spectrographs, Sensors, Space telescopes, Microopto electromechanical systems, Micromirrors, Digital micromirror devices, Astronomical imaging, Molybdenum, Spectroscopes

PROCEEDINGS ARTICLE | February 20, 2017
Proc. SPIE. 10116, MOEMS and Miniaturized Systems XVI
KEYWORDS: Microelectromechanical systems, Mirrors, Laser therapeutics, Etching, Scanners, Silicon, Endoscopes, Deep reactive ion etching, Wafer bonding

PROCEEDINGS ARTICLE | February 20, 2017
Proc. SPIE. 10116, MOEMS and Miniaturized Systems XVI
KEYWORDS: Microelectromechanical systems, Sensors, Scanners, Reliability, Position sensors, Electrical breakdown, Piezoresistive sensors

PROCEEDINGS ARTICLE | February 27, 2015
Proc. SPIE. 9375, MOEMS and Miniaturized Systems XIV
KEYWORDS: Microelectromechanical systems, Mirrors, Sensors, Scanners, Silicon, Resistance, Micromirrors, Position sensors, Piezoresistive sensors, Wheatstone bridges

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8977, MOEMS and Miniaturized Systems XIII
KEYWORDS: Gold, Mirrors, Electrodes, Space telescopes, Micromirrors, Astronomical imaging, Molybdenum, Semiconducting wafers, Cryogenics, Wafer bonding

PROCEEDINGS ARTICLE | March 13, 2013
Proc. SPIE. 8616, MOEMS and Miniaturized Systems XII
KEYWORDS: Packaging, Mirrors, Silica, Electrodes, Silicon, Signal processing, Micromirrors, Medium wave, Semiconducting wafers, Wafer bonding

Showing 5 of 8 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top