Dr. Sergio Camacho-León
Research Professor at Tecnológico de Monterrey
SPIE Involvement:
Author
Area of Expertise:
MEMS , MOEMS , Optical Metrology , Microfabrication
Publications (5)

PROCEEDINGS ARTICLE | March 21, 2016
Proc. SPIE. 9705, Microfluidics, BioMEMS, and Medical Microsystems XIV
KEYWORDS: Fabrication, Microelectromechanical systems, Microfluidics, Biosensing, Electrodes, Molecules, Copper, Laser ablation, Micromachining, Computer aided design

PROCEEDINGS ARTICLE | April 11, 2013
Proc. SPIE. 8694, Nondestructive Characterization for Composite Materials, Aerospace Engineering, Civil Infrastructure, and Homeland Security 2013
KEYWORDS: Microelectromechanical systems, Oxides, Thin films, Sensors, Composites, Biosensors, Nondestructive evaluation, 3D modeling, Finite element methods, Reactive ion etching

PROCEEDINGS ARTICLE | March 14, 2013
Proc. SPIE. 8619, Physics and Simulation of Optoelectronic Devices XXI
KEYWORDS: Gold, Photodetectors, Refractive index, Prisms, Surface plasmons, Titanium, Metals, Dielectrics, Interfaces, Reflectivity

PROCEEDINGS ARTICLE | February 16, 2012
Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI
KEYWORDS: Actuators, Oxides, Resonators, Etching, Metals, Scanners, Thermal effects, Microopto electromechanical systems, Reactive ion etching, Temperature metrology

PROCEEDINGS ARTICLE | October 12, 2005
Proc. SPIE. 5958, Lasers and Applications
KEYWORDS: Microelectromechanical systems, Actuators, Interferometers, Electrodes, Interferometry, Liquid crystal on silicon, Finite element methods, Aluminum nitride, Beam shaping, Phase shifts

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