Dr. Sergio Camacho-León
Research Professor at Tecnológico de Monterrey
SPIE Involvement:
Author
Area of Expertise:
MEMS , MOEMS , Optical Metrology , Microfabrication
Publications (5)

Proceedings Article | 21 March 2016
Proc. SPIE. 9705, Microfluidics, BioMEMS, and Medical Microsystems XIV
KEYWORDS: Laser ablation, Microfluidics, Copper, Electrodes, Computer aided design, Fabrication, Microelectromechanical systems, Biosensing, Micromachining, Molecules

Proceedings Article | 11 April 2013
Proc. SPIE. 8694, Nondestructive Characterization for Composite Materials, Aerospace Engineering, Civil Infrastructure, and Homeland Security 2013
KEYWORDS: Composites, Nondestructive evaluation, Microelectromechanical systems, Sensors, Biosensors, Finite element methods, Oxides, 3D modeling, Thin films, Reactive ion etching

Proceedings Article | 14 March 2013
Proc. SPIE. 8619, Physics and Simulation of Optoelectronic Devices XXI
KEYWORDS: Reflectivity, Gold, Dielectrics, Titanium, Metals, Photodetectors, Interfaces, Refractive index, Prisms, Surface plasmons

Proceedings Article | 16 February 2012
Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI
KEYWORDS: Oxides, Scanners, Metals, Actuators, Microopto electromechanical systems, Etching, Thermal effects, Resonators, Reactive ion etching, Temperature metrology

Proceedings Article | 12 October 2005
Proc. SPIE. 5958, Lasers and Applications
KEYWORDS: Liquid crystal on silicon, Interferometry, Finite element methods, Actuators, Aluminum nitride, Interferometers, Beam shaping, Phase shifts, Electrodes, Microelectromechanical systems

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