Mr. Seungchul Oh
Senior Director at Auros Technology Inc
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Optical design, Prisms, Light sources, Lithium, Light emitting diodes, Ultraviolet radiation, Inspection, Optical inspection, Near field, Beam shaping, Semiconducting wafers, Near field optics, Defect inspection

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