Shazad Paracha
Process Engineer at SAMSUNG Austin Semiconductor LLC
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 20 October 2014
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Lithography, Reticles, Modulation, Polarization, Inspection, Scanning electron microscopy, Bridges, Photomasks, Semiconducting wafers, Classification systems

Proceedings Article | 2 April 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Reticles, Defect detection, Error analysis, Inspection, Scanning electron microscopy, Photomasks, Critical dimension metrology, Semiconducting wafers, Wafer testing, Classification systems

Proceedings Article | 23 September 2013
Proc. SPIE. 8880, Photomask Technology 2013
KEYWORDS: Reticles, Air contamination, Particles, Ions, Silicon, Inspection, Chromium, Pellicles, Semiconducting wafers, Adhesives

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