Mr. Sherif Hany Mousa Profile

Sherif Hany Mousa

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Publications (2)

Proceedings Article | 23 March 2020

Model based CAOPC flow for memory chips to improve performance and consistency of RET solutions

Srividya Jayaram, Sherif Hany Mousa, Ashutosh Rathi, Pat LaCour, Zhenguo Zheng, Lei Zhang, Yaobin Feng, Jun Yao

Proc. SPIE. 11327, Optical Microlithography XXXIII

KEYWORDS: Lithography, Pattern recognition, Manufacturing, Optical proximity correction, SRAF, Model-based design, Resolution enhancement technologies

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Proceedings Article | 20 March 2018

Model based cell-array OPC development for productivity improvement in memory device fabrication

Ahmed Seoud, Sherif Hany, Juhwan Kim, Jebum Yoon, Boram Jung, Sang-Jin Oh, Byoung-Sub Nam, Seyoung Oh, Chan-Ha Park

Proc. SPIE. 10587, Optical Microlithography XXXI

KEYWORDS: Lithography, Manufacturing, Computer simulations, Photomasks, Optical proximity correction, SRAF, Semiconducting wafers

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