In this paper, the near-field optical properties of nanoparticles, which are deposited on Titanium (Ti) substrate and irradiated by laser pulses with wavelength ranging from 0.4 nm to 1.2 nm, are presented by using numerical simulations. Considering the near-field electric intensity distribution, the enhancement factor (E/E<sub>0</sub>)<sup>2</sup> and the peak enhancement value (E<sub>max</sub>/E<sub>0</sub>)<sup>2</sup>, we compared the difference between gold particle with 200 nm diameter and SiO<sub>2</sub> particle with 2μm diameter. It is found out that, the intensity distribution around the contact point between particles and Ti substrate shows as an annular. The enhancement factor generated by 200 nm gold particle is over 10 times larger than 2 μm SiO<sub>2</sub> particle after irradiated by incident light with the same wavelength. In experiment section, using 200 nm diameter gold particles, we fabricated nanoholes on Ti-6Al-4V surface with diameter about 170 nm when laser pulse energy was set as 0.354 J/cm<sup>2</sup>. The diameter of nanoholes is corresponding to the previous simulation results in this paper.
It is difficult to detect the elastic deformation on the metal surface induced by nanosecond laser pulse. Optical fiber sensor system is suitable for detecting the elastic deformation, which has many advantages such as the high sensitivity, fast speed (GHz), non-contact, non-loss and point-measurement. We set up the measuring system to analyze the deformation mechanism firstly. Then, the elastic deformation on the metal surface was investigated. The relation between the shock-wave and elastic deformation was analyzed. The result of the present work implicated that as the nanosecond laser pulse radiated to the metal surface, elastic deformation had a delay time which was around 320ns. And the deformation presented the damped oscillation law. The data of laser-induced plasma shock wave were fitted and the fitting degree was 97.696%.The variation law of laser-induced plasma shock-wave was obtained. These results helped to make the laser removal applied to the manufacturing technique better.