Mr. Shuai Liu
at National Institute of Metrology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 31, 2013
Proc. SPIE. 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation
KEYWORDS: Ferroelectric materials, Metrology, Interferometers, Sensors, Calibration, Error analysis, Optical metrology, 3D metrology, 3D scanning, Space reconnaissance

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