Probe is the kernel component of the precision measuring instrument for the system accuracy which is determined by the probe characteristic. Three-dimensional scanning probe is an ideal choice for gear helical error measurement because it has both space coordinates points detecting capacity and scan capacity on the space of curves and surfaces. In order to make full use of the probe’s capacity and improve the measurement accuracy, characteristic evaluation of the probe is necessary before used. The static calibration equipment for the sensor has been established based on the high precision PZT micro displacement platform. Linear characteristic analysis and compensate of the ultra-high precision three-dimensional scanning probe has been done by this equipment, which greatly improved the accuracy of the probe. Finally, probe characteristic under working status is analyzed and experimentally verified which will be very helpful to compensate the probe errors.