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Shuai Liu
at National Institute of Metrology
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Publications (1)
Proceedings Article | 31 January 2013 Paper
Characteristic evaluation and experimental analysis of the ultrahigh precision three-dimensional scanning probe
Shuai Liu, Zi Xue, Shu-liang Ye, Dexin Hou, He-yan Wang
Proceedings Volume 8759, 87592M (2013) https://doi.org/10.1117/12.2014564
KEYWORDS: Ferroelectric materials, 3D scanning, Calibration, Sensors, Interferometers, Space reconnaissance, 3D metrology, Error analysis, Optical metrology, Metrology
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