Microfluidic chips and microreactors have been widely used in various fields due to their low reagent consumption, fast reaction speed and good safety. Besides, temperature is the key parameter of many biochemical reactions. So it is important for the creation of temperature controllable micro-reactor. However, There are some problems in existing micro-reactors, such as structure, size, temperature control method and temperature distribution. Here we report a method based on an improved femtosecond laser wet etching technology and metal-microsolidifying process for the fabrication of microchannel and 3D microcoils inside fused silica. Based on this approach, we fabricate a temperature controllable micro-reactor used for polymerase chain reaction (PCR) by integrating 3D metallic microcoils and microfluidic channel twined by microcoils inside fused silica. We precisely and conveniently get required temperature by varying the voltage of microcoils. The micro-reactor also exhibits a high integration level and good uniformity of temperature distribution. In addition, we get a miniaturized device which can be conveniently integrated.
Microlens arrays (MLAs) with special functions such as superhydrophobicity and self-cleaning ability are highly desired in the micro-optical system which is often used in easily polluted environment. In this paper, a new method is demonstrated to fabricate the MLAs with a high fill factor and superhydrophobicity. The method combines femtosecond laser wet etching, polydimethylsiloxane (PDMS) replication and subsequently femtosecond laser direct writing process. The fabricated MLAs decorated with micro/nanoscale hierarchical structures compared with the normal MLAs. Water droplets on the as-prepared surfaces exhibit superhydrophobicity and ultralow adhesion which endows the fabricated samples possess self-cleaning property. The as-fabricated MLAs could find their applications in bioscience research, ocean exploration, endoscopic surgery, microfluidic system, etc.