Dr. Soichi Inoue
Senior Fellow at KIOXIA Corp
SPIE Involvement:
Conference Program Committee | Author
Publications (102)

Proceedings Article | 18 March 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Lithography, Mirrors, Optical design, Reticles, Optical lithography, Polarization, Process control, Projection systems, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers

Proceedings Article | 19 March 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Mirrors, Scanners, Carbon dioxide lasers, Pellicles, Relays, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Plasma

Proceedings Article | 13 March 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Lithography, Electron beams, Contamination, Molecules, Extreme ultraviolet, Extreme ultraviolet lithography, Picosecond phenomena, Semiconducting wafers, Standards development, Temperature metrology

Proceedings Article | 13 March 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Mirrors, Contamination, Data modeling, Scanners, Spectroscopy, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Systems modeling, EUV optics

Proceedings Article | 17 April 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Carbon, Contamination, Statistical analysis, Molecules, Electrons, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Statistical modeling, Protactinium

Showing 5 of 102 publications
Conference Committee Involvement (13)
Extreme Ultraviolet (EUV) Lithography XII
21 February 2021 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography XI
24 February 2020 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography X
25 February 2019 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography IX
26 February 2018 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography VIII
27 February 2017 | San Jose, California, United States
Showing 5 of 13 Conference Committees
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