Mr. Tah-Te Shih Profile

Tah-Te Shih

at TSMC

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Publications (2)

Proceedings Article | 12 December 2009 Paper

Implementation of new recticle inspection technology for progressive mask defect detection strategy on memory fab

Ellison Chen, Toroy Tien, Mike Yeh, Todd T. Shih, Jackie Cheng, Jenny Hsu, David Wu, Andy Lan

Proceedings Volume 7520, 752026 (2009) https://doi.org/10.1117/12.837028

KEYWORDS: Inspection, Photomasks, Reticles, Air contamination, Semiconducting wafers, Defect detection, Optical proximity correction, SRAF, Image transmission, Sensors

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Proceedings Article | 12 December 2009 Paper

Overlay improvement by ASML HOWA 5th alignment strategy

Richer Yang, Todd Shih, CY Chiang, Raf Wang, Wythe Lin, Jackie Chen, Jonathan Chiu, Wilson Hsu

Proceedings Volume 7520, 752023 (2009) https://doi.org/10.1117/12.839816

KEYWORDS: Semiconducting wafers, Optical alignment, Distortion, Overlay metrology, Front end of line, Lithography, Scanners, Capacitance, Current controlled current source, Yield improvement

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