Dr. Tatsuya Ariga
SPIE Involvement:
Author
Publications (22)

Proceedings Article | 26 April 2007
Proc. SPIE. 6346, XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
KEYWORDS: Light sources, Optical amplifiers, Oscillators, Gas lasers, Extreme ultraviolet, Extreme ultraviolet lithography, Carbon monoxide, Pulsed laser operation, Laser systems engineering, Tin

Proceedings Article | 21 March 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Mirrors, Glasses, Ions, Nd:YAG lasers, Solids, Gas lasers, Extreme ultraviolet, Carbon monoxide, Plasma, Tin

Proceedings Article | 19 March 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Light sources, Optical amplifiers, Ions, Nd:YAG lasers, Gas lasers, Extreme ultraviolet, Carbon monoxide, Pulsed laser operation, Plasma, Tin

Proceedings Article | 14 February 2007
Proc. SPIE. 6454, High Energy/Average Power Lasers and Intense Beam Applications
KEYWORDS: Light sources, Optical amplifiers, Oscillators, Gas lasers, Extreme ultraviolet, Extreme ultraviolet lithography, Carbon monoxide, Pulsed laser operation, Laser systems engineering, Tin

Proceedings Article | 24 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Optical amplifiers, Oscillators, Amplifiers, Xenon, Gas lasers, Extreme ultraviolet, Carbon monoxide, Pulsed laser operation, Plasma, Laser systems engineering

Showing 5 of 22 publications
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