Vikas Tripathi
Member of Technical Staff at GLOBALFOUNDRIES Singapore Pte Ltd
SPIE Involvement:
Publications (6)

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11328, 1132809 (2020)
KEYWORDS: Design for manufacturing, Chromium, Lithography, Electronic design automation, Design for manufacturability, Metals, Standards development, Manufacturing, Computing systems, Semiconductor process technologies

Proceedings Article | 20 March 2019 Presentation + Paper
Proceedings Volume 10962, 109620R (2019)
KEYWORDS: Lithography, Data modeling, Machine learning, Feature extraction, Metals, Computer programming, Profiling, Neural networks, Calibration, Process modeling

Proceedings Article | 20 March 2018 Presentation + Paper
Proceedings Volume 10588, 105880J (2018)
KEYWORDS: Lithography, Algorithm development, Integrated circuits, Manufacturing, Integrated circuit design, Design for manufacturability

Proceedings Article | 20 March 2018 Presentation + Paper
Proceedings Volume 10588, 105880E (2018)
KEYWORDS: Photomasks, Analog electronics, Double patterning technology, Transistors, Lithography, Manufacturing, Mirrors, Lithium, Semiconductors, Printing

Proceedings Article | 28 March 2017 Paper
Proceedings Volume 10148, 1014814 (2017)
KEYWORDS: Transistors, Metals, Databases, Resistors, Lithium, Digital electronics, Error analysis, Capacitors, Analog electronics, Manufacturing, System on a chip, Semiconductors, Silicon, New and emerging technologies

Showing 5 of 6 publications
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