Vikas Tripathi
Member of Technical Staff at GLOBALFOUNDRIES Singapore Pte Ltd
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 20 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Data modeling, Calibration, Metals, Computer programming, Feature extraction, Profiling, Neural networks, Machine learning, Process modeling

Proceedings Article | 20 March 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Semiconductors, Lithography, Mirrors, Lithium, Manufacturing, Printing, Photomasks, Transistors, Double patterning technology, Analog electronics

Proceedings Article | 20 March 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Lithography, Manufacturing, Integrated circuits, Algorithm development, Integrated circuit design, Design for manufacturability

Proceedings Article | 28 March 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Semiconductors, Lithium, Capacitors, Databases, Metals, Error analysis, Silicon, Manufacturing, Transistors, Resistors, Analog electronics, Digital electronics, System on a chip, New and emerging technologies

Proceedings Article | 18 March 2015
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Lithography, Metals, Silicon, Manufacturing, Design for manufacturing, Chemical analysis, Nanoimprint lithography, Failure analysis, Chemical mechanical planarization, Design for manufacturability

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