Mr. Wenqing Li Profile

Wenqing Li

at Beijing institute of Space Mechanics and Electricity

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Proceedings Article | 8 July 2019 Paper

Study on surface roughness change of modified silicon carbide in ion beam polishing

Wenqin Li, Yonggang Wang, Xiaohui Meng, Jiyou Zhang

Proceedings Volume 11063, 110631F (2019) https://doi.org/10.1117/12.2540720

KEYWORDS: Silicon carbide, Ion beams, Polishing, Surface finishing, Mirrors, Surface roughness, Silicon, Laser systems engineering

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The change of surface roughness of modified silicon carbide during ion beam polishing is introduced in this paper. Silicon carbide has been gradually applied to laxer mirrors due to its excellent physical properties. Ion beam polishing is a high precision and high certainty processing method, but it is not suitable to directly process silicon carbide body due to material reasons. First, the silicon carbide substrate material was modified by ion beam assisted deposition of silicon, and then the relationship between the depth of ion beam removal and the surface roughness evolution experiment was carried out. The experiment was divided into two stages. The first stage was to verify the quality of the modified layer, after a large number of processing and removal, to detect the change of the modified layer; the second stage was to find the change rule of the roughness, by adjusting the ion beam addition. In order to control the trend of roughness the basis of experiments, a Ф600mm modified silicon carbide plane mirror was fabricated by ion beam polishing. After two iterations, the processing results show that the surface roughness of the sample can be controlled within 2 nanometers(Sq value)by adjusting the processing strength and removal depth.

Proceedings Article | 19 October 2016 Paper

Ion beam figuring of Φ520mm convex hyperbolic secondary mirror

Xiaohui Meng, Yonggang Wang, Ang Li, Wenqing Li

Proceedings Volume 10154, 1015406 (2016) https://doi.org/10.1117/12.2243825

KEYWORDS: Ion beams, Mirrors, Aspheric lenses

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The convex hyperbolic secondary mirror is a Φ520-mm Zerodur lightweight hyperbolic convex mirror. Typically conventional methods like CCOS, stressed-lap polishing are used to manufacture this secondary mirror. Nevertheless, the required surface accuracy cannot be achieved through the use of conventional polishing methods because of the unpredictable behavior of the polishing tools, which leads to an unstable removal rate. Ion beam figuring is an optical fabrication method that provides highly controlled error of previously polished surfaces using a directed, inert and neutralized ion beam to physically sputter material from the optic surface. Several iterations with different ion beam size are selected and optimized to fit different stages of surface figure error and spatial frequency components. Before ion beam figuring, surface figure error of the secondary mirror is 2.5λ p-v, 0.23λ rms, and is improved to 0.12λ p-v, 0.014λ rms in several process iterations. The demonstration clearly shows that ion beam figuring can not only be used to the final correction of aspheric, but also be suitable for polishing the coarse surface of large, complex mirror.

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