Dr. Xiaolong Jiang
at China Academy of Engineering Physics
SPIE Involvement:
Author
Publications (5)

SPIE Journal Paper | 20 October 2015
OE Vol. 54 Issue 10
KEYWORDS: Diffraction, Diffraction gratings, Photoresist materials, Gold, Optical design, Etching, Quartz, Photomasks, Photoresist developing, Ion beams

Proceedings Article | 17 April 2015
Proc. SPIE. 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
KEYWORDS: Diffraction gratings, Diffraction, Photoresist materials, Photoresist developing, Silica, Etching, Laser damage threshold, Photomasks, Gold, Ion beams

Proceedings Article | 13 March 2015
Proc. SPIE. 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
KEYWORDS: Etching, Ion beams, Raster graphics, Ions, Diffraction gratings, Optical components, Algorithm development, Vacuum ultraviolet, Synchrotron radiation, Synchrotron technology

Proceedings Article | 28 August 2014
Proc. SPIE. 9170, Nanoengineering: Fabrication, Properties, Optics, and Devices XI
KEYWORDS: Etching, Silicon, Anisotropic etching, Lithography, Fabrication, Semiconducting wafers, Potassium, Photoresist materials, Aluminum, Optical alignment

Proceedings Article | 9 July 2013
Proc. SPIE. 8786, Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers
KEYWORDS: Etching, Silica, Laser induced damage, HF etching, Contamination, Metals, Polishing, Resistance, Cerium, Surface finishing

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