Mr. xuefeng wang
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 18, 2006
Proc. SPIE. 6223, Micro (MEMS) and Nanotechnologies for Space Applications
KEYWORDS: Actuators, Gold, Etching, Polymers, Metals, Nickel, Silicon, Scanning probe lithography, Atomic force microscopy, Semiconducting wafers

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