Yagnesh Vaderiya
at
SPIE Involvement:
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Publications (1)

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Image compression, Metals, Silicon, Manufacturing, Design for manufacturing, Double patterning technology, Optical proximity correction, SRAF, Critical dimension metrology, Yield improvement, Design for manufacturability

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