Dr. Yan Cheng
at Shanghai Inst of Microsystem & Information Tech
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 12 October 2016
Proc. SPIE. 9818, 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage
KEYWORDS: Semiconductors, Chemical species, Crystals, Electrons, Resistance, Chalcogenides, Chromium, Transmission electron microscopy, Antimony, Tellurium

Proceedings Article | 12 October 2016
Proc. SPIE. 9818, 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage
KEYWORDS: Carbon, Etching, Argon, Polymers, Crystals, Ions, Reactive ion etching, Fluorine, Plasma, Anisotropy

Proceedings Article | 12 October 2016
Proc. SPIE. 9818, 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage
KEYWORDS: Thin films, Switching, Crystals, Resistance, Chalcogenides, Chemical vapor deposition, Scanning electron microscopy, Atomic layer deposition, Thin film deposition, Fast packet switching

Proceedings Article | 12 October 2016
Proc. SPIE. 9818, 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage
KEYWORDS: Diffraction, Data storage, Chemical species, Annealing, Crystals, Transmission electron microscopy, Tellurium, Crystallography, Scanning transmission electron microscopy, Temperature metrology

Proceedings Article | 24 January 2013
Proc. SPIE. 8782, 2012 International Workshop on Information Storage and Ninth International Symposium on Optical Storage
KEYWORDS: Titanium dioxide, Annealing, Particles, In situ metrology, Crystals, Composites, Resistance, Transmission electron microscopy, Crystallography, Temperature metrology

Showing 5 of 9 publications
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