Dr. Yan A. Liu Profile

Dr. Yan A. Liu

EDA Engineer at Intel Corp

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Publications (3)

Proceedings Article | 23 March 2012 Paper

EUVL multilayer mask blank defect mitigation for defect-free EUVL mask fabrication

Pei-Yang Yan, Yan Liu, Marilyn Kamna, Guojing Zhang, Robert Chen, Fabian Martinez

Proceedings Volume 8322, 83220Z (2012) https://doi.org/10.1117/12.927018

KEYWORDS: Photomasks, Extreme ultraviolet lithography, Scanning electron microscopy, Defect inspection, Electron beam lithography, Precision measurement, Silica, Optical alignment, Inspection, Atomic force microscopy

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Proceedings Article | 23 September 2009 Paper

Deployment of OASIS.MASK (P44) as direct input for mask inspection of advanced photomasks

Suheil Zaatri, Yan Liu, Michael Asturias, Joan McCall, Wei-Guo Lei, Tsafi Lapidot, Khen Ofek, Aviram Tam, Mark Wagner, Amanda Bowhill, Emile Sahouria, Minyoung Park, Neil DeBella, Pradiptya Ghosh, Steffen Schulze

Proceedings Volume 7488, 748823 (2009) https://doi.org/10.1117/12.833443

KEYWORDS: Inspection, Photomasks, Metrology, Vestigial sideband modulation, Data conversion, Data processing, Manufacturing, Standards development, Semiconducting wafers, Computer simulations

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Proceedings Article | 14 May 2007 Paper

LER transfer from a mask to wafers

Hiroyoshi Tanabe, Ginga Yoshizawa, Yan Liu, Vikram Tolani, Koichiro Kojima, Naoya Hayashi

Proceedings Volume 6607, 66071H (2007) https://doi.org/10.1117/12.728964

KEYWORDS: Line edge roughness, Photomasks, Semiconducting wafers, Line width roughness, Scanning electron microscopy, Spatial frequencies, Light sources, Wafer-level optics, Fourier transforms, Decision support systems

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