Dr. Yanchang Zheng
at Univ of Science and Technology of China
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 17 April 2015
Proc. SPIE. 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
KEYWORDS: Gold, Diffraction, Silica, Etching, Photoresist materials, Ion beams, Photomasks, Laser damage threshold, Photoresist developing, Diffraction gratings

Proceedings Article | 13 March 2015
Proc. SPIE. 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
KEYWORDS: Optical components, Etching, Ions, Ion beams, Raster graphics, Synchrotron radiation, Algorithm development, Vacuum ultraviolet, Diffraction gratings, Synchrotron technology

Proceedings Article | 28 August 2014
Proc. SPIE. 9170, Nanoengineering: Fabrication, Properties, Optics, and Devices XI
KEYWORDS: Fabrication, Lithography, Potassium, Etching, Silicon, Photoresist materials, Aluminum, Optical alignment, Semiconducting wafers, Anisotropic etching

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