Yilei Hua
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | September 19, 2017
Proc. SPIE. 10386, Advances in X-Ray/EUV Optics and Components XII
KEYWORDS: Diffraction, Reflection, Interferometers, X-rays, X-ray diffraction, Silicon, Optical fabrication, Synchrotron radiation, X-ray astronomy, Diffraction gratings

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