Dr. Yoshitaka Komuro
at Tokyo Ohka Kogyo Co Ltd
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Semiconductors, Lithography, Optical lithography, Polymers, Electrons, Diffusion, Quantum efficiency, Extreme ultraviolet, Semiconductor manufacturing, Extreme ultraviolet lithography, High volume manufacturing, Semiconducting wafers, Chemically amplified resists

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Optical lithography, Polymers, Image processing, Annealing, Error analysis, Coating, Materials processing, Manufacturing, Directed self assembly, Critical dimension metrology

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Lithography, Polymers, Diffusion, Quantum efficiency, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing, Semiconducting wafers, Polymer thin films, Chemically amplified resists

PROCEEDINGS ARTICLE | March 13, 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Lithography, Polymers, Diffusion, Quantum efficiency, Ionization, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Double positive medium, Chemically amplified resists

PROCEEDINGS ARTICLE | April 17, 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Electron beams, Polymers, Matrices, Diffusion, Ionization, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Absorption, Chemically amplified resists

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Sensors, Polymers, Silicon, Hydrogen, Diffusion, Photoresist materials, Molecular interactions, Semiconducting wafers, Chemically amplified resists

Showing 5 of 6 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top