Youngsoo Song
Researcher at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 20 March 2019 Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Optical properties, Fourier transforms, Neural networks, Photomasks, Machine learning, Optical proximity correction, Neurons

Proceedings Article | 20 March 2018 Paper
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Lithography, Clocks, Etching, Metals, Copper, Resistance, Signal processing, Photomasks, Double patterning technology, Chemical mechanical planarization

Proceedings Article | 28 March 2017 Presentation + Paper
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Optical lithography, Etching, Metals, Manufacturing, Reliability, 3D modeling, Signal processing, Photomasks, Double patterning technology, Source mask optimization, Electrical engineering

Proceedings Article | 16 March 2016 Paper
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Lithography, Optical lithography, Etching, Metals, Manufacturing, Capacitance, Photomasks, Integrated circuits, Double patterning technology, 193nm lithography

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