Yu Cheng
at Soochow Univ
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
KEYWORDS: Lithography, Holography, Etching, Photoresist materials, Ion beams, Photomasks, Nanoimprint lithography, Reactive ion etching, Photoresist developing, Nanolithography

PROCEEDINGS ARTICLE | December 21, 2013
Proc. SPIE. 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication
KEYWORDS: Diffraction, Holography, Imaging systems, Etching, Spectroscopy, Coating, Photoresist materials, Ion beams, Liquids, Diffraction gratings

PROCEEDINGS ARTICLE | December 21, 2013
Proc. SPIE. 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication
KEYWORDS: Diffraction, Optical design, Holography, Etching, Photoresist materials, Ion beams, Infrared radiation, Photomasks, Reactive ion etching, Diffraction gratings

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