Prof. Yuejing Qi
at Academy of Opto-Electronics CAS
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | March 24, 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Lithography, Diffraction, Imaging systems, Image processing, Image acquisition, Interferometry, Wavefront aberrations, Control systems, Image analysis, Motion detection, Image quality, Wave propagation, Image sensors, Motion measurement, Control systems design

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Confocal microscopy, Lithography, Monochromatic aberrations, Metrology, Sensors, Inspection, Wavefront sensors, Wavefronts, Collimators, Zernike polynomials, Optical alignment, Wavefront reconstruction

PROCEEDINGS ARTICLE | August 7, 2015
Proc. SPIE. 9623, 2015 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
KEYWORDS: Gold, Diffraction, Metrology, Error analysis, Wavefront sensors, Wavefronts, Optical testing, Collimators, Aluminum, Spherical lenses

PROCEEDINGS ARTICLE | August 5, 2015
Proc. SPIE. 9621, 2015 International Conference on Optical Instruments and Technology: Advanced Lasers and Applications
KEYWORDS: Optical fibers, Zemax, Sensors, Error analysis, Wavefront sensors, Wavefronts, Optical testing, Charge-coupled devices, Wavefront reconstruction, Temperature metrology

PROCEEDINGS ARTICLE | September 18, 2014
Proc. SPIE. 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
KEYWORDS: Gold, Diffraction, Metrology, Finite-difference time-domain method, Silver, Wavefront sensors, Wavefronts, Projection systems, Aluminum, Spherical lenses

PROCEEDINGS ARTICLE | September 18, 2014
Proc. SPIE. 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
KEYWORDS: Diffraction, Monochromatic aberrations, Finite-difference time-domain method, Spatial filters, Calibration, Wavefront sensors, Wavefronts, Wavefront aberrations, Collimators, Spherical lenses

Showing 5 of 6 publications
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