Mr. Yuta Morizane
at Tokyo Denki Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | September 5, 2017
Proc. SPIE. 10372, Material Technologies and Applications to Optics, Structures, Components, and Sub-Systems III
KEYWORDS: Lithography, Optical lithography, Visual analytics, Visualization, Diffusion, Epoxies, Chemical analysis, Liquids

PROCEEDINGS ARTICLE | July 9, 2015
Proc. SPIE. 9658, Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII
KEYWORDS: Thin films, Lithography, Light sources, Microfluidics, Optical lithography, Ultraviolet radiation, Printing, Photomasks, Semiconducting wafers, Absorption

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