Yzzer Roman
at Cymer LLC
SPIE Involvement:
Publications (5)

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12051, PC120510B (2022) https://doi.org/10.1117/12.2615263
KEYWORDS: Imaging systems, Process control, Photoresist materials, Lithography, 3D image processing, Semiconducting wafers, Scanners, Overlay metrology, Optical lithography, Image processing

Proceedings Article | 26 February 2021 Presentation
Will Conley, Vince Vince Plachecki, Stephen Hsu, Michael Crouse, Rongkuo Zhao, John He, Pieter Scheijgrond, Dezheng Sun, Xiaoyang Li, Dongqing Zhang, Ming-Chun Tien, Jun Ye, Rafael Howell, Chen Liu, Xiaolong Zhang, Hai Li, Zuanyi Li, Xiaobo Xie, Jing Su, Yzzer Roman
Proceedings Volume 11613, 116130E (2021) https://doi.org/10.1117/12.2585651

Proceedings Article | 21 March 2018 Paper
Yzzer Roman, Ted Cacouris, Kumar Raja Guvindan Raju, Dinesh Kanawade, Walt Gillespie, Siqi Luo, Eric Mason, David Manley, Saptaparna Das
Proceedings Volume 10587, 1058716 (2018) https://doi.org/10.1117/12.2299387
KEYWORDS: Light sources, Neon, Deep ultraviolet, Carbon, Metals, Semiconducting wafers, Helium, Semiconductors, Nitrogen

Proceedings Article | 20 June 2017 Paper
Yzzer Roman, Dinesh Kanawade, Walt Gillespie, Siqi Luo, Mark Thever, Thomas Duffey, Kevin O'Brien, Rahul Ahlawat, Andrei Dorobantu, Eric Gross, Eric Mason
Proceedings Volume 10147, 101471Y (2017) https://doi.org/10.1117/12.2260307

Proceedings Article | 15 March 2016 Paper
Dinesh Kanawade, Yzzer Roman, Ted Cacouris, Josh Thornes, Kevin O'Brien
Proceedings Volume 9780, 97801H (2016) https://doi.org/10.1117/12.2219942
KEYWORDS: Neon, Light sources, Excimer lasers, Chemical elements, Lithography, Excimers, Deep ultraviolet, Semiconductors, Halogens, Fluorine, Molybdenum

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