Yzzer Roman
at Cymer LLC
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 21 March 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Semiconductors, Carbon, Light sources, Deep ultraviolet, Metals, Nitrogen, Helium, Neon, Semiconducting wafers

Proceedings Article | 20 June 2017
Proc. SPIE. 10147, Optical Microlithography XXX

Proceedings Article | 15 March 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Semiconductors, Lithography, Light sources, Deep ultraviolet, Excimer lasers, Excimers, Neon, Chemical elements, Molybdenum, Fluorine, Halogens

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