Zhengfang Liu
at Siemens EDA
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Polishing, Roads, Metals, Particles, Manufacturing, Design for manufacturing, Photomasks, Integrated circuit design, Yield improvement, Design for manufacturability

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Lithography, Databases, Manufacturing, Computer simulations, Design for manufacturing

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Roads, Data modeling, Databases, Silicon, Manufacturing, Neural networks, Machine learning, Semiconducting wafers, Data analysis, Design for manufacturability

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Lithography, Roads, Statistical analysis, Visualization, Databases, Metals, Computer simulations, Photomasks, Optics manufacturing, Standards development

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Lithography, Copper, Manufacturing, Design for manufacturing, Modeling and simulation, Optimization (mathematics), Semiconducting wafers, Product engineering, Model-based design, Chemical mechanical planarization

Showing 5 of 14 publications
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