Dr. Zhenxin Zhong Profile

Dr. Zhenxin Zhong

at Thermo Fisher Scientific Inc

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 27 April 2023 Poster + Paper

Michael Strauss, Chen Li, Chris Hakala, Xiaoting Gu, Antonio Mani, Zhenxin Zhong

Proceedings Volume 12496, 1249639 (2023) https://doi.org/10.1117/12.2658795

KEYWORDS: Metrology, Etching, Silicon, Nanosheets, Gallium arsenide, 3D metrology, Machine learning, Nitrogen, Process modeling, Automation

Proceedings Article | 13 March 2018 Paper

Zhenxin Zhong, Jason Donald, Gavin Dutrow, Justin Roller, Ozan Ugurlu, Martin Verheijen, Oleksii Bidiuk

Proceedings Volume 10585, 105852X (2018) https://doi.org/10.1117/12.2297403

KEYWORDS: Metrology, Signal to noise ratio, Scanning transmission electron microscopy, X-rays, Image processing, Electron beams, Logic

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